Expert insights on ultra pure water reuse and quality control in semiconductor fabs are shared in an interview with METTLER TOLEDO.
Ultra-pure water (UPW), also known as deionized (DI) water, is crucial in semiconductor fabs for processes like etching, cleaning, and chemical mechanical planarization (CMP).
The semiconductor industry is the world’s largest consumer of UPW, with fabs typically treating raw water to UPW-grade quality for distribution to process tools.
Reducing water consumption is a key environmental focus, guided by industry efforts like the FO-98 committee.
Image Credit: Gorodenkoff/Shutterstock.
Author summary: Experts discuss ultra pure water management.